[DOWNLOAD] "Micro and Nano Fabrication" by Hans H. Gatzen, Volker Saile & Jürg Leuthold * Book PDF Kindle ePub Free
eBook details
- Title: Micro and Nano Fabrication
- Author : Hans H. Gatzen, Volker Saile & Jürg Leuthold
- Release Date : January 02, 2015
- Genre: Engineering,Books,Professional & Technical,
- Pages : * pages
- Size : 16268 KB
Description
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.